Klarf file

If data pull is required to create klarf files, you can contact me to discuss creating this feature. Now view the gallery in Windows see example below. Just collect all the images that look like they have the same signature into a separate folder. A possible problem with a tool creates subtle signatures, but the defect counts are not much different from the random noise from other wafers. Just pull the klarf files, run KlarfView, and then use the map galleries to separate the maps with the signatures from the rest of the pack.

Now you have a set of maps to use to find the tool or process that causes this particular problem. View Maps by Defect Size What if someone asked you to define how defect sizes as defined by the inspection tool are distributed on a wafer.

Assume the wafer map looks like the one below on the left. KlarfView can display defects in different colors, by size bins. Now, suppose you want to see fewer defect sizes, or just one size range. The map on the right illustrates how you can use KlarfView to view the same map, using size filtering.

You can get a copy of DBCluster from my web site. Stacked Layer Maps You want to view stacked maps that have defects colored by detection layer. Unfortunately, due to the way klarf files are constructed, you will need to run KlarfView each time for each klarf file layer. Fortunately, KlarfView is designed to permit coloring by layer via a batch command file. To do this, create a command file with the options set like the example below.

In this example, we have 5 layers we wish to stack. The other layers have different colors set for the defects. All layers are transparent, and without die displayed. When this command file is run, you get the maps below. It helps to move each file to PowerPoint in the order of earliest to latest layer.

Only you know what your requirements are. With KlarfView, you have the flexibility to view the maps in virtually any way you want. So it can be used in any document e. Powerpoint or Word just like any image.

Just view your maps in Windows as a gallery as described in the section Signatures , use the screen capture program to capture all or part of the gallery, and then paste the image to your document.

These are only a few examples of the types of views you can create. This is the field you will be changing. You can also change the manually-defined sizebins. The upper limit for each bin range is separated by commas.

The lowest value on the left is the min size for the first bin inclusive. The details on all the options will be covered later. Save the settings for the shortcut. Run the shortcut on your klarf files.

These are the run-time parameters. Here is a description of all the parameters and their options. This file will be read before the other run-time parameters are applied. You will generally not need to use this parameter.

The default is 0 defects all klarfs. The default is defects. The default is 1 gigabyte. Leaving any variable out will leave that data out of the filename. Any combination of valid paths and wildcards are acceptable. This is how you can use KlarfView to automatically generate defect maps. This places the legend outside the plot area, at the bottom, centered, and lists the values horizontally. Decimals can be used. Any valid 6-character hexadecimal color code can be used. Any valid 6-character hex-dec color code can be used.

The max number of bins is limited by the number of definitions you have in the plotoptions file "colorbysettings. The value should correspond to the field name in the klarf file. Default is Default is 1. You can edit this file using OpenOffice Calc or Excel. The original version of WMapConvert was not designed with this in mind. We've now developed a batch oriented version intended to support these types of conversions.

Please go to the WMBatch Page if you are interested in this. Often when converting from one format to another, the user finds that data required by the output format is not present in the input format. Wafermap Convert will display a window that enables the user to manually fill in the missing data. This is especially important because many simple input formats do not clearly define where the 0,0 position is located; many do not include the data units and some do not include the flat orientation.

Various Map formats use different terms for parameters and measurements. Out glossary of terms provides some details on terms used and can help when converting from one format to another. Press SCAN; the program will scan the input file and present a screen showing what information it was able to extract. The legend will only be displayed if defects are colored by any of the fields. Full control over wafer and die line width, type and color.

Option 2: Run using the kv. Figure 1: Example of a patterned wafer map. Figure 2: Example of a patterned wafer map. Figure 3: Example of a unpatterned wafer map. Figure 4: Example of a unpatterned wafer map. Figure 5: Defects colored by cluster number.

Figure 6: Defects colored by cluster number. Figure 7: Defects colored by class number. Figure 8: Defects colored by class number. The fields in this file are: Number: A unique number for each row. Not used by the program. For reference only. Ignore: Put any character here for the program to ignore the row. Group: The name of the column of data to be used for coloring.

The names correspond exactly to how they are listed in the klarf file. Value: The value of the parameter. Example: class codes 0, 1, 2, etc. Type: The point type to be used for this value. Point types are documented in the Gnuplot manual. Color: The point color to be used for this value. Point colors are documented in the Gnuplot manual. Size: The point size to be used for this value.

Point sizes are documented in the Gnuplot manual. Figure Gnuplot point types and their numbers. Figure Example of wafer map gallery using Windows Thumbnail View. Uses Reports Generate images for all wafers inspected within a period of time. Visual Data Mining Use map galleries using maps generated by KlarfView to look for repeating signatures over several wafers or groups of wafers.

Figure Maps with similar signatures can be collected into folders. Share this: Twitter Facebook Email Print. Like this: Like Loading Leave a Reply Cancel reply Enter your comment here